LioniX International
  • Home
  • Photonics
    • Photonic IC Development
      • Photonic integrated circuit design
      • Photonic integrated circuit modules
      • Photonics foundry for scalable volume
    • Photonic IC technology
      • TriPleX® Silicon Nitride Waveguides
      • Photonic packaging and assembly
      • MEMS with photonics
    • MPW services
      • MPW 1550nm
      • MPW 850nm
      • MPW dates
      • Book your MPW spot!
    • Applications
      • AR/VR
      • Integrated microwave photonics
      • Optical coherence tomography
      • Optical phased arrays
      • Photonic biosensor
      • Quantum photonics
      • Ultra-narrow linewidth tunable laser
  • MEMS
    • Custom MEMS development & production
      • MEMS process development and engineering
      • Custom MEMS production and fabrication
      • MEMS services
      • MEMS Design Support
    • MEMS technology
      • Deep Reactive Ion Etching for MEMS
      • Wafer Level Packaging of MEMS
      • TriPleX® integrated photonics for optical MEMS
      • Silicon on Insulator Wafers (SOI) Processing
      • Ion Sensitive Field-Effect Transistor (ISFET)
      • Cantilevers for MEMS
    • MEMS Processes
      • LPCVD
      • PECVD Processes
      • Deep Reactive Ion Etching for MEMS
      • Lithography
      • Wet etching
      • Wafer bonding
      • Evaporation
      • Sputtering
      • Oxidation
      • Back End Processes
    • MEMS applications
      • MEMS sensors & instrumentation
      • BioMEMS
      • Inertial MEMS
      • Microfluidics
      • Micromachining
      • Optofluidics
    • MEMS Solutions
      • Bronkhorst – Gas flow sensor
      • ESA – Life Marker Chip
      • Evonetix – Synthesized DNA
      • Microsens – pH sensors with ISFET chips
      • MBARI – ISFET for deep sea pH sensor
      • Onset – Conductivity sensor
      • PerfectEdge TEM Membranes
      • SmartTip – CIPT probes
      • ThermoFisher – SEM specimen heating and biasing holder
      • University of Strasbourg – MEMS Microfluidic Optical Cavities
  • Markets
    • Defense
    • Artificial Intelligence (AI)
    • Space
    • Telecom/datacom
    • Life science
    • Metrology
    • Instrumentation
  • About us
    • Blog
    • News
    • Events
    • Newsletter subscription
    • Publications
    • R&D projects
    • People
    • Work at LioniX International
  • Contact Us
  • Menu Menu
Home » MEMS » Custom MEMS development & production

Custom MEMS development and production

LioniX International specializes in custom MEMS development and manufacturing. Our philosophy is that there are ‘no two MEMS alike’. We therefore offer optimized methodologies for custom MEMS design and custom MEMS process development and engineering and MEMS fabrication processes to precisely meet your specifications without compromising on functionality.

During our history we have served hundreds of customers and put numerous MEMS applications into production successfully. During these efforts we accumulated an incredible amount of MEMS processing knowledge which we apply to new customers’ projects every day.

For our MEMS manufacturing we use ‘state-of-the-art’ equipment allowing flexible processing routes without jeopardizing process stability and cross contamination.

Talk to one of our team about your custom MEMS requirements

Project phases for MEMS development, engineering and manufacturing

As a MEMS partner we work with you to co-develop your MEMS product. During the development you will always be in control and involved in important decisions. You can stop the development at any time.

Diagram showing project phases for custom MEMS development at LioniX International

Depending on the maturity of your ideas and work done, we may start a project with you at any one of the following phases:

Feasibility

A full development project may start with a feasibility study. In this phase we will investigate and report on whether a MEMS product meeting your specifications can be developed and manufactured. We will work with you to explore the risks and define white spots in the process in short loops. Manufacturing costs per chip and non-recurring costs will be estimated.

Custom MEMS process development

In the MEMS process development phase, we isolate and execute parts of the manufacturing process outside the main project. These process short loops will therefore not put whole batches at risk, and minimize development costs. Depending on the outcome, we may advise on changes in the manufacturing process.

MEMS Prototyping

Once the MEMS process is in place, we can start a MEMS prototype run. This phase is used to further refine parameters, with flexible specifications and we will expect some variation in outcome Yielded chips may be used for proof of concept or for further fund raising. The prototypes can also be used to verify MEMS design models, start packaging work, address system integration, and test device performance.

MEMS Engineering run

In the an engineering run the focus is on yield improvement, test optimization, cost optimization and ramp up of production volumes. We work to ensure that specifications converge to their final values.

MEMS Production

In the MEMS production phase, the design and process are frozen, and specifications are fixed. We track and document every step of the process, guaranteeing full wafer and chip history. We can deliver diced wafers on foil, or package your chips in trays. If you require us to, we can fully test all all of your chip. The risks of non-yielding wafers/chips are on our side.

MEMS manufacturing services and outsourcing

As a MEMS partner we also offer stand-alone MEMS manufacturing services as part of your existing manufacturing flow and provide full outsourcing for some or all of your MEMS development and production requirements.

Latest Blog Items

  • Fabrication and Assembly of an AR/VR Light-Engine Prototype in Project MatEl31 July 2025 - 11:59
  • LioniX TriPleX silicon nitride external cavity laser
    New Photonic Integrated Tuneable EC Laser with PZT Actuators22 January 2025 - 10:55
  • DEMUX PIC assemblyLioniX International
    Reconfigurable (DE)MUX Filter for Flexible Frequency Allocation4 November 2024 - 14:34
  • LioniX silicon nitride chip
    Quantum scientists give Triplex® a HUG to entangle single photons1 May 2024 - 16:52
  • LioniX dual hybrid InP/Si3N4 laser assembly
    Want lower RF drift? Double down on laser PICs!22 April 2024 - 15:55

Latest News Items

  • Behind the scenes with RTV Oost’s ToekomstMakers26 June 2026 - 11:19
  • Our CEO is the latest guest on the Manufacturing Matters podcast!16 April 2026 - 09:52
  • Global Photonics Engineering Contest 20269 February 2026 - 16:52
  • EU Invests €15M to Help Companies Supercharge Their Products with Light16 April 2025 - 13:23
  • The image shows a render of LioniX new facility.
    LioniX International is moving to a new purpose-built facility in Enschede, The Netherlands9 December 2024 - 15:37

LioniX International BV

PO Box 456
7500 AL Enschede
The Netherlands

Visiting address

Hengelosestraat 527
7521 AG Enschede
The Netherlands

Contact details

Phone: +31 53 20 30 053
E-mail: info@lionix-int.com

© Copyright - LioniX International
  • Link to LinkedIn
  • Link to Youtube
  • Disclaimer
  • Privacy Policy
Scroll to top Scroll to top Scroll to top