LioniX International
  • Home
  • Photonics
    • Photonic IC Development
      • Photonic integrated circuit design
      • Photonic integrated circuit modules
      • Photonics foundry for scalable volume
    • Photonic IC technology
      • TriPleX® Silicon Nitride Waveguides
      • Photonic packaging and assembly
      • MEMS with photonics
    • MPW services
      • MPW 1550nm
      • MPW 850nm
      • MPW dates
      • Book your MPW spot!
    • Applications
      • AR/VR
      • Integrated microwave photonics
      • Optical coherence tomography
      • Optical phased arrays
      • Photonic biosensor
      • Quantum photonics
      • Ultra-narrow linewidth tunable laser
  • MEMS
    • Custom MEMS development & production
      • MEMS process development and engineering
      • Custom MEMS production and fabrication
      • MEMS services
      • MEMS Design Support
    • MEMS technology
      • Deep Reactive Ion Etching for MEMS
      • Wafer Level Packaging of MEMS
      • TriPleX® integrated photonics for optical MEMS
      • Silicon on Insulator Wafers (SOI) Processing
      • Ion Sensitive Field-Effect Transistor (ISFET)
      • Cantilevers for MEMS
    • MEMS Processes
      • LPCVD
      • PECVD Processes
      • Deep Reactive Ion Etching for MEMS
      • Lithography
      • Wet etching
      • Wafer bonding
      • Evaporation
      • Sputtering
      • Oxidation
      • Back End Processes
    • MEMS applications
      • MEMS sensors & instrumentation
      • BioMEMS
      • Inertial MEMS
      • Microfluidics
      • Micromachining
      • Optofluidics
    • MEMS Solutions
      • Bronkhorst – Gas flow sensor
      • ESA – Life Marker Chip
      • Evonetix – Synthesized DNA
      • Microsens – pH sensors with ISFET chips
      • MBARI – ISFET for deep sea pH sensor
      • Onset – Conductivity sensor
      • PerfectEdge TEM Membranes
      • SmartTip – CIPT probes
      • ThermoFisher – SEM specimen heating and biasing holder
      • University of Strasbourg – MEMS Microfluidic Optical Cavities
  • Markets
    • Defense
    • Artificial Intelligence (AI)
    • Space
    • Telecom/datacom
    • Life science
    • Metrology
    • Instrumentation
  • About us
    • Blog
    • News
    • Events
    • Newsletter subscription
    • Publications
    • R&D projects
    • People
    • Work at LioniX International
  • Contact Us
  • Menu Menu
Home » About us » News » Ultra low-power stress-optic actuators

Ultra-low power, high speed stress-optic actuators for silicon nitride PICs

Improvements in speed and power consumption promise new applications for reconfigurable low-loss PICs.

Last month LioniX International published results demonstrating ultra-low power, high-speed actuators for low-loss silicon nitride Photonic Integrated Circuits (PICs). The stress-optic actuators show actuation speeds down to 4.25 μs and power consumption of less than 1 μW in quasi-DC operation. The technology is commercially available, enabling a scalable solution to on-chip actuation and opening up new applications for low-loss reconfigurable PICs.

The technology demonstrated novel use of a piezo-electric material, lead zirconate titanate – PZT, deposited in wafer level processes above the waveguide. A voltage applied to the piezo layer induces stress in the waveguide below, resulting in rapid a phase shift in the optical signal.

Until recently, passive silicon nitride PICs lacked a scalable solution for the integration of fast modulators and actuators at wafer level. This is a vital capability for large scale roll out of advanced functionality used in transducers, phased arrays and high speed reconfigurable PICs. Previous solutions have included the use of optically lossy electro-optic materials and power-hungry thermo-optic actuation using metal heaters.

PZT Stress optic actuator for silicon nitride waveguide
schematic of PZT stress optic actuator

Above: stress-optic actuator layer fabricated from piezo material. Stress is induced in the waveguide below.

Download the technical briefing on ultra low power, high speed stress optic actuators

However, the stress-optic method detailed in LioniX’s latest publication offers a 50 times increase in actuation speed and 100,000 times reduction in power consumption when compared to heater-based actuation, with very low excess optical loss.

Now, with drastic improvements in performance and power consumption Lionix International is busy integrating the wafer-level technology for existing developments as well as eying up new applications. An immediate beneficiary is LioniX’s high capacity broadband beamforming matrices for microwave communications. Similarly, high speed swept lasers and optical phased arrays are an obvious targets for near-future developments.

Latest Blog Items

  • Fabrication and Assembly of an AR/VR Light-Engine Prototype in Project MatEl31 July 2025 - 11:59
  • LioniX TriPleX silicon nitride external cavity laser
    New Photonic Integrated Tuneable EC Laser with PZT Actuators22 January 2025 - 10:55
  • DEMUX PIC assemblyLioniX International
    Reconfigurable (DE)MUX Filter for Flexible Frequency Allocation4 November 2024 - 14:34
  • LioniX silicon nitride chip
    Quantum scientists give Triplex® a HUG to entangle single photons1 May 2024 - 16:52
  • LioniX dual hybrid InP/Si3N4 laser assembly
    Want lower RF drift? Double down on laser PICs!22 April 2024 - 15:55

Latest News Items

  • Behind the scenes with RTV Oost’s ToekomstMakers26 June 2026 - 11:19
  • Our CEO is the latest guest on the Manufacturing Matters podcast!16 April 2026 - 09:52
  • Global Photonics Engineering Contest 20269 February 2026 - 16:52
  • EU Invests €15M to Help Companies Supercharge Their Products with Light16 April 2025 - 13:23
  • The image shows a render of LioniX new facility.
    LioniX International is moving to a new purpose-built facility in Enschede, The Netherlands9 December 2024 - 15:37

LioniX International BV

PO Box 456
7500 AL Enschede
The Netherlands

Visiting address

Hengelosestraat 527
7521 AG Enschede
The Netherlands

Contact details

Phone: +31 53 20 30 053
E-mail: info@lionix-int.com

© Copyright - LioniX International
  • Link to LinkedIn
  • Link to Youtube
  • Disclaimer
  • Privacy Policy
Link to: Your 850 nm MPW download Link to: Your 850 nm MPW download Your 850 nm MPW download Link to: Photonic biosensing results for covid-19 testing Link to: Photonic biosensing results for covid-19 testing Photonic biosensing results for covid-19 testing
Scroll to top Scroll to top Scroll to top